Viscosicity test1/26/2024 Refer to ASTM D445 and ASTM F66 for additional information and definitions. Optionally, kinematic viscosity may be multiplied by the density of the photoresist to obtain dynamic viscosity in units of centipoise (cP). Efflux time is measured in seconds and multiplied by the calibration constant of the viscometer to obtain kinematic viscosity in units of centistokes (cSt). This method, a simplified version of ASTM D445 and ASTM F66 is intended for determining the kinematic viscosity of photoresists by measuring the time for a volume of liquid to flow under gravity through a calibrated glass capillary at a fixed temperature. This procedure describes a method for determining the kinematic viscosity of photoresists. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Available at and in November 2011 originally published in 1982 previously published November 2003. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. This proficiency testing program (PTP) was specially designed to give analytical laboratories instant validation while measuring viscosity in new and used. This Standard was technically approved by the Micropatterning Global Technical Committee.
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